Должность
старший научный сотрудник
Телефон
E-mail
Учёная степень
кандидат технических наук (2005 г.)
| Образование | ТУСУР, Факультет электронной техники, Кафедра «Электронные приборы и устройства», г.Томск (1996-2001 гг.) | ||
|---|---|---|---|
|
Научные интересы |
|
||
|
Учёная степень |
|
||
| ORCID |
0000-0002-0844-0356
|
||
| Researcher ID | HPI-0002-2023 | ||
| Scopus | 6506983874 | ||
| РИНЦ Author ID | 161950 | ||
| SPIN-код | 8613-8469 | ||
| Участие в проектах РФФИ и РНФ |
|
||
| Участие в образовательной деятельности | Научное руководство студентами и аспирантами Томского государственного университета систем управления и радиоэлектроники (ТУСУР) и Томского государственного университета (ТГУ). | ||
| Премии, награды |
|
Список наиболее значимых публикаций
- Gridless, very low energy, high-current, gaseous ion source//Review of Scientific Instruments 81 (2) 02B307 (2009) https://doi.org/10.1063/1.3259233
- Boron ion beam generation using a self-sputtering planar magnetron// Review of Scientific Instruments 85 (2) 02C302 (2013) https://doi.org/10.1063/1.4824643
- A bulk plasma generator based on a plasma cathode discharge// Instruments and Experimental Techniques 46 (3) 384-387 (2003) https://doi.org/10.1023/A:1024478708509
- Generation of space charge compensated low energy ion flux// Review of Scientific Instruments 79 (2) 02B719 (2008) https://doi.org/10.1063/1.2823891
- Inverted end-Hall-type low-energy high-current gaseous ion source// Review of Scientific Instruments 79 (2) 02B302 (2008) https://doi.org/10.1063/1.2801348
- Low-energy dc ion source for low operating pressure// Review of Scientific Instruments 85, 083502 (2014) https://doi.org/10.1063/1.4891697
- TRIATOMIC HYDROGEN ION GENERATION IN A LOW-PRESSURE GAS DISCHARGE // VACUUM, 162, 2019, 63-66, DOI: 10.1016/j.vacuum.2019.01.025
- Planar magnetron discharge with confinement of injected electrons// Vacuum, 192, 2021, DOI10.1016/j.vacuum.2021.110487
- Deposition of tungsten disilicide films by DC magnetron sputtering at ultra-low operating pressure// Surf&Coat.Techn., 422, 2021, DOI10.1016/j.surfcoat.2021.127501
- Adhesion and friction performance of DLC/rubber: The influence of plasma pretreatment// Friction 9, 627–641 (2021) https://doi.org/10.1007/s40544-020-0436-6
- Mass-to-charge ion composition of plasma in a magnetron discharge with reactive sputtering of titanium target// PLASMA PROCESSES AND POLYMERS, 18 (3) , DOI10.1002/ppap.202000210
- Parameters and properties of a pulsed planar vacuum magnetron discharge// Vacuum, 2020, 178, 109400. doi.org/10.1016/j.vacuum.2020.109400
- Deposition of Cu-films by a planar magnetron sputtering system at ultra-low operating pressure// Surface and Coatings Technology, 2020, 389, 125600. doi.org/10.1016/j.surfcoat.2020.125600
- NBR surface modification by gaseous plasma source with electron injection// Surface and Coatings Technology, 2020, 388, 125556. doi.org/10.1016/j.surfcoat.2020.125556
- Effects of gas pressure and discharge current on beam composition in a magnetron discharge ion source// Review of Scientific Instruments, 2019, 90(11), 113312. doi.org/10.1063/1.5125950
- Effect of electron injection on the parameters of a pulsed planar magnetron// Vacuum, V.159, p. 200-203, 2019. https://doi.org/10.1016/j.vacuum.2018.10.042
- Ion mass-to-charge ratio in planar magnetron plasma with electron injections// JOURNAL OF PHYSICS D: APPLIED PHYSICS, V.51(41), 415201, 2018 https://doi.org/10.1088/1361-6463/aadbd6
- Planar magnetron sputtering with supplementary electron injection// Vacuum, V.143, P. 458-463, 2017 DOI: 10.1016/j.vacuum.2017.02.011
- Operating modes of a hydrogen ion source based on a hollow-cathode pulsed Penning discharge// Review of Scientific Instruments, V.87, 02B703 (2016). http://dx.doi.org/10.1063/1.4931800. - импакт-фактор 1,5
- Magnetron discharge-based boron ion source// AIP Conference Proceedings 2011,090005 (2018)
Диссертации
Новости
Лаборатории
Разработки и Инновации
#PROP_TITLE#
#PROP_VALUE#

